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Title [REGULAR PAPER] Finite-element-method based Adaptive Iterative Learning Control for a Rapid Thermal Processing System
Authors Teng-Fei Xiao;Xiao-Dong Li;Qing-Yuan Xu
DOI https://doi.org/10.5573/JSTS.2020.20.1.084
Page pp.84-92
ISSN 1598-1657
Keywords Finite element method; rapid thermal processing; iterative learning control; intelligent control; partial differential equation
Abstract For the temperature regulation in a rapid thermal processing system in semiconductor manufacturing, we develop an adaptive iterative learning controller based on the finite-element-method in this paper. A finite-dimensional model of the system is constructed by the finite-element-method firstly. Then, adaptive iterative learning controller is designed based on the finite-dimensional model. Simulations are performed by heating the wafer in the system with the developed control method. Simulation results show the effectiveness of the proposed adaptive iterative learning controller.