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The Journal of Semiconductor Technology and Science is published bimonthly. The contents of contributed papers are aimed at the semiconductor technology and science, including fabrication processes, devices, circuits, and MEMS. Contributed papers may be of a review paper or a research nature, but the latter must be original and must not duplicate descriptions or derivations available elsewhere. Due to the broad audience for JSTS, authors are strongly cautioned against the use of unexplained acronyms or other jargon. Each paper submitted to the Journal of Semiconductor Technology and Science is to be examined by the Editorial Board and will be critically evaluated and judged for its originality, novelty, and technological value.

Manuscript preparation for review, JSTS formatting and galley proofing

All papers must be written in English. Entire manuscript composed of text, tables and figures, must be prepared electronically in MS Word or pdf file formats, double spaced, free style. The figures and captions should be included in the text. Each manuscript should contain 5 indexing terms. The accepted paper will be converted into JSTS journal format by a JSTS official using both MS Word and pdf file format, which will be used for galley proofing. See JSTS formatted sample file in for details. The authors are highly encouraged to prepare their manuscripts such that they can easily be converted into JSTS format. To expedite rapid publishing, two kinds of papers are consolidated in JSTS.

  • 1) Regular papers: more than 3 journal pages. Published normally within 6 months.
  • 2) Letters: up to 3 journal pages. Published normally within 3 months.
  • 3) Sample Word File : [Download]
    General Manuscript Preparation : [Download]
  • 4) Submission Check List File : [Download]
  • 5) Manuscript Ethics Bylaws : [Download]
  • 6) Copyright Transfer Agreement Form : [Download]


Journal of Semiconductor Technology and Science (JSTS) launches the ScholarOne Manuscript site.

Through the JSTS ScholarOne site, you can submit a paper, review the paper, check the status of the paper review, the acceptance decision, the publication schedule and others.

To submit a paper, you can access the bottom link and create user account in ScholarOne.

Open Access

Articles published in this journal are available free in both print and the electronic form at This policy follows the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non- commercial use, distribution and reproduction in any medium, provided the original work is properly cited.

ISO Journal Title

Journal of Semiconductor Technology and Science This paper meets the requirements of KS X ISO 9706, ISO 9706-1994 and ANSI/NISO Z.39.48-1992(Permanence of Paper).

Ethics and Responsibilities of Authors

All submitted manuscripts should be original and should not be considered by any other scientific journal for publication at the same time. No part of the accepted manuscript should be duplicated in any other scientific journal without the permission of the Editorial Board.


JSTS follows the authorship guidelines of ICMJE. Authorship credit should be based on the following criteria:

  • 1) Substantial contributions to the conception or design of the work; or the acquisition, analysis, or interpretation of data for the work; AND
  • 2) Drafting the work or revising it critically for important intellectual content; AND
  • 3) Final approval of the version to be published; AND
  • 4) Agreement to be accountable for all aspects of the work in ensuring that questions related to the accuracy or integrity of any part of the work are appropriately investigated and resolved.

Editorial and Peer Review Process

The editor selects peer reviewers by recommendation of the Editorial Board members or from the specialist database owned by the Editorial Board. Acceptance of the manuscript is decided, based on the critiques and recommended decision of the reviewers. A reviewer's decision is classified as 'accept', 'minor revision', 'major revisions' and 'reject'. If there is marked discrepancy in the decisions between the tree reviewers, association editor or in the opinions between the author and reviewer(s), the Editor may send the manuscript to another reviewer for additional comments and recommended decision. Three repeated decisions of 'review after revision' are regarded as 'rejection.' The reviewed manuscripts are returned back to the corresponding author with comments and recommended revisions. A final decision on acceptance or rejection for publication is forwarded to the corresponding author from the Editorial office. The peer review process takes usually three to four months after the manuscript submission. Revisions are usually requested to take account of criticism and comments made by reviewers. Failure to resubmit the revised manuscript within three months is regarded as a withdrawal. The corresponding author must indicate clearly what alterations have been made in response to the reviewers' comments point by point. Acceptable reasons should be given for noncompliance with any recommendation of the reviewers.

Publication Type

It accepts original papers of research articles, short communications, reviews, editorial, opinion, book reviews, teaching tips, and other invited papers on the undergraduate, graduate, and continuing education in the field of semiconductor technology and science, including fabrication processes, devices, circuits, and MEMS.

Clearance and Copyright

Submission of a manuscript amounts to assurance that it has received proper clearance from the author's company or institution, that it has not been copyrighted, published, or accepted for publication elsewhere, that it is not currently being considered for publication elsewhere while under consideration by JSTS. It is the policy of the IEIE to own the copyright to the technical contributions it publishes. To comply with the IEIE copyright policy, authors are requested by e-mail to send a Copyright Transfer Agreement Form to JSTS after acceptance. This form can also be downloaded from This is to be printed, signed, and sent by the author(s) to JSTS (Attn: Ms. Hongbi Do, JSTS Publication Center : Rm #907 Science and Technology New Bldg., 635-4 Yucksam-dong, Kangnam-ku, Seoul, 135-703, Korea.)

Page charge and subscription

We would like to inform authors of publication charges of JSTS. For the manuscript submitted from 2014, the author’s company or institution will be requested to pay a charge to cover part of the cost of publication upon acceptance of the manuscript. Page charges are KW 300,000 (US$300) for the first six pages and KW 50,000 (US$50) per page for each page in excess of six.

Pages Submission Fee
1 ~ 6 (up to page 6) US$ 300
7 ~ US$ 50 per each page

Inquiries concerning page charge should be addressed to:

Rm #907 Science and Technology New Bldg. Teheranro 7-gil 22, Kangnam-ku, Seoul 06130, Korea

Tel (82-2)553-0255, Fax(82-2)552-6093, , Ms. Hongbi Do