I. INTRODUCTION
               Recently, the demand for a low power and high resolution ADC (Analog to Digital Converter)
                  has been increasing with the development of bio-signal processing system. A single
                  block that consumes most of power in DSM (Delta Sigma Modulator) is OPAMP(Operational
                  Amplifier). The design methodology to decrease power consumption of the conventional
                  DSMs is either to reduce the number of OPAMPs or to replace OPAMPs with other circuits
                  which consumes less power within DSM. The conventional 4th-order DSM usually requires four OPAMPs. The first methodology to design 4th-order DSM[1] for low power consumption was to employ two amplifiers with time-interleaving technique.
                  However, this method suffers from one disadvantage. In other words, this conventional
                  delta-sigma modulator tends to increase the input capacitor, reduce kT/C noise, and
                  decrease back-end capacitor to reduce the layout area[2]. Therefore employment of the same amplifier at the front and back-end stage of DSM
                  becomes less efficient in terms of capacitances, power consumption, and layout area.
                  The second technique is to design a delta-sigma modulator based upon utilizing inverters
                  instead of operational amplifiers[3,4]. This method allows inverters operating in the weak inversion region to be able to
                  utilize a low power supply voltage and consequently, low power consumption. This technique
                  suffers from finite gain of the inverter. The third design methodology practiced in
                  the literature is involved with time-interleaving technique and digital signal processing
                  technique[5]. In the circuit proposed in [5][5], the first-stage integrator and the second-stage integrator are implemented with
                  the single operational amplifier and the time-interleaving method, and the third-stage
                  integrator is implemented by digital signal processing. However, the 5-bit flash ADC
                  employed as a quantizer for digital signal processing resulted in a large power consumption.
               
               In this paper, a CMOS 4th-order DSM with a single reconfigurable fully differential operational amplifier is
                  described. In order to reduce the power consumption of the proposed DSM, a design
                  technique to reuse the single reconfigurable fully differential operational amplifier
                  four times is employed by the four individual integrator stages within the proposed
                  DSM. The single reconfigurable fully differential OPAMP is converted into the two
                  stage OPAMP with one compensation capacitor associated with a reasonable phase margin
                  to guarantee stability in the first and second integrator stage of the DSM. The third
                  and fourth integrator stages utilize the folded-cascode OPAMP reconfigured from the
                  single reconfigurable OPAMP. It is reconfigured so that it is able to obtain acceptable
                  phase margin and sustain stability of the DSM.
               
               This paper is organized as follows. In section II, the design technique of the fourth
                  order modulator with the single reconfigurable fully differential OPAMP is presented.
                  The measurement results and performance comparison with other conventional works are
                  discussed in section III. Conclusions are drawn in section IV.
               
             
            
                  II. THE PROPOSED ARCHITECTURE
               The block diagram of the proposed architecture with the four different clock phases
                  is presented in Fig. 1. The conventional fourth order DSM can be represented by the top block diagram shown
                  in Fig. 1. It can be replaced by the proposed one with the four different clock phases, as
                  shown in Fig. 1. During the first clock phase(Phase 1), the modulator samples and integrates the
                  analog input signal. The second clock phase (Phase 2) allows the modulator to sample
                  and integrate the output signal of the OPAMP generated from the first clock phase.
                  The third clock phase(Phase 3) enables the modulator to accomplish the sample mode
                  and integration mode operations on the output signal of the OPAMP from the second
                  clock phase. During the fourth clock phase(Phase 4), the modulator samples and integrates
                  the output signal of the OPAMP produced from the third clock phase. The operation
                  of the proposed DSM explained above can be described by the noise transfer function
                  (NTF), which are calculated by 'The Delta-Sigma Toolbox' using Matlab[2].
               
                
                  
                  
                        
                        
Fig. 1. Block diagram of the proposed fourth order DSM with the single reconfigurable
                           amplifier at the four different phases.
                        
 
                      
                  
               
               NTF is given by (1) with coefficients in (2)–(5).
               
                
                  
                  
 
                  
                  
                  
               
                
                  
                  
 
                  
                  
                  
               
                
                  
                  
 
                  
                  
                  
               
                
                  
                  
 
                  
                  
                  
               
                
                  
                  
 
                  
                  
                  
               
               where coefficients, $C_{0}$, $C_{1}$, $C_{2}$, and $C_{3}$ within the NTF are extracted
                  from the matlab simulation and these optimized coefficients of loop factors with stability
                  issues considered are presented in Table 2.
               
               The proposed methodology requires the DSM to operate at four times faster clock frequency
                  than that of the conventional DSM due to four clock phases. In order for the proposed
                  DSM to maintain the same OSR as the conventional ones, four times faster clock frequency
                  than that of the conventional ones should be required. Even though it requires the
                  four times faster clock frequency, it turns out that the bandwidth of the bio-signal
                  stays narrow and gives little load to the reconfigurable amplifier.
               
                
                  
                  
                        
                        
Fig. 2. Circuit diagram of the proposed 4th order delta-sigma modulator
 
                      
                  
               
               The fully differential input signals, Sin+ and Sin- are applied to the capacitors,
                  $C_{s}$, $C_{i}$, and $C_{f}$ represented by sampling capacitor, integrating capacitor,
                  and feedback capacitor, respectively. Correlation between coefficient of loop factor
                  and these capacitors, coefficients of the loop factor, and capacitors used in the
                  modulator are presented in Tables 1- 3, respectively. These capacitors are implemented by MIM capacitors in terms of unit
                  capacitor, 50 fF. The magnitude of the integrating capacitors, $C_{i1}$ and $C_{i2}$
                  is designed to be large, so that the input thermal noise (kT/C) should be suppressed
                  as small as it could be during the first two clock phases. The fully differential
                  outputs of the reconfigurable OPAMP with two conventional CMFB (Common Mode Feed Back)
                  circuits drive the latched comparator, such that the latched comparator drives three
                  cascade-connected DFFs (D Flip-Flop) to be able to generate a single bit stream signal.
                  The twelve clock signals, as shown in Fig. 3, to control both sample mode and integration mode during the four cycles is generated
                  by the delayed circuit with the non-overlapping clocks, q1 and q2. These clocks are
                  utilized to sample and integrate the signals at each stage of DSM, respectively.
               
                
                  
                  
                        
                        
Table 1. Correlation between coefficient of loop factor and capacitor
                     
                      
                        
                              
                                 
                                    | Coefficient | Value | Coefficient | Value | 
                           
                           
                                 
                                    | a1 | Cs1/Ci1 | b1 | Cf1/Ci1 | 
                              
                                    | a2 | Cs1/Ci2 | b2 | Cf1/Ci2 | 
                              
                                    | a3 | Cs2/Ci3 | b3 | Cf2/Ci3 | 
                              
                                    | a4 | Cs2/Ci4 | b4 | Cf2/Ci4 | 
                           
                        
 
                     
                   
                  
               
                
                  
                  
                        
                        
Table 2. Coefficients of the loop factor
                     
                      
                        
                              
                                 
                                    | Coefficient | Value | Coefficient | Value | 
                           
                           
                                 
                                    | a1 | 0.1 | b1 | 0.1 | 
                              
                                    | a2 | 0.1 | b2 | 0.1 | 
                              
                                    | a3 | 0.4 | b3 | 0.2 | 
                              
                                    | a4 | 0.4 | b4 | 0.2 | 
                           
                        
 
                     
                   
                  
               
                
                  
                  
                        
                        
Table 3. Capacitor used in the modulator
                     
                      
                        
                              
                                 
                                    | Capacitor | Value | Capacitor | Value | 
                           
                           
                                 
                                    | Cs1 | 2 pF | Ci1 | 20 pF | 
                              
                                    | Cs2 | 2 pF | Ci2 | 20 pF | 
                              
                                    | Cs3 | 400 fF | Ci3 | 1 pF | 
                              
                                    | Cs4 | 400 fF | Ci4 | 1 pF | 
                              
                                    | Cf1 | 2 pF | Cf3 | 200 fF | 
                              
                                    | Cf2 | 2 pF | Cf4 | 200 fF | 
                           
                        
 
                     
                   
                  
               
                
                  
                  
                        
                        
Fig. 3. Phase diagram of the twelve clock signals to control both sample mode and
                           integration mode.
                        
 
                      
                  
               
               The sample and integration operation of the DSM for each cycle (clock phase) can be
                  performed and distinguished by four different clocks (sel1, sel2, sel3, and sel4).
                  The sample and integration mode for the first two cycles can be controlled by the
                  clocks, sel1, sel2, p1q1, p2q1, p1p2q2, sam12, and sel12. In the same manner, the
                  sample and integration mode for the second two cycles can be controlled by the clocks,
                  sel3, sel4, p3q1, p4q1, p3p4q2, sam34, and sel34. During the sample mode of the first
                  cycle, the switches of sel1, q1, p1q1, and sam12 turn on, where the switch, sam12
                  allows the sample capacitors, $C_{s2}$ and $C_{f2}$ to be charged to the common mode
                  voltage. During the integration mode of the first cycle, the switches of sel1, q2,
                  p1p2q2, and sam34 turn on, where the switch, sam34 allows the sample capacitors, $C_{s1}$
                  and $C_{f1}$ to be charged to the common mode voltage. In the similar manner, the
                  sample mode of the second cycle enables the switches of sel2, q1,
               
               p2q1, and sam12 to turn on. The integration mode of the second cycle allows the switches
                  of sel2, q2, p1p2q2, and sam34 to turn on. The similar operation on the sample mode
                  and integration mode of the third cycle and the fourth cycle is applied to control
                  the switches, sel3, se4, p3q1, p4q1, p3p4q2, sam12, sam34, and sel34. The control
                  signals, sel12 and sel34 are employed to select either two stage OPAMP during the
                  first two clock phases or folded-cascode OPAMP during the second two clock phases,
                  respectively. The DAC signals such as dacpx (dacp3, dacp4, dacp5, dacp6) and dacnx
                  (dacn3, dacn4, dacn5, dacn6), as included in Fig. 2 are generated by the switching circuit. The signals, vonx (von3 ~ von6) and vopx
                  (vop3 ~ vop6) are produced by the latched comparator with the digital buffers, DFFs.
                  It is noted that the signals, vonx and vopx are specified at the output node of the
                  latched comparator and DFFs. The circuit schematic of the single reconfigurable fully
                  differential OPAMP is presented in Fig. 4. The constant trans-conductance bias circuitry not shown in the circuit diagram is
                  utilized to provide the DC bias voltages, Vn1, Vn2, Vp1, and Vp2 for the folded-cascode
                  OPAMP. It is noted that the switch, sel12 enables the output nodes (vop2, von2 in
                  Fig. 3) of the two stage fully differential OPAMP architecture to connect to the nodes,
                  int1- and int1+ as presented in Fig. 2 during the first two clock phases. The switch, sel34 allows the output nodes (von1,
                  vop1 in Fig. 3) of the folded-cascode OPAMP to connect to the nodes, int1- and int1+ as presented
                  in Fig. 2 during the second two clock phases.
               
                
                  
                  
                        
                        
Fig. 4. Circuit schematic of the single reconfigurable fully differential operational
                           amplifier.
                        
 
                      
                  
               
               As two different fully differential OPAMPs are utilized for the DSM, two different
                  independent CMFB circuits are employed to provide both vcmfb1 and vcmfb2 to each OPAMP.
                  Since the conventional DSM suffers from the input thermal noise, kT/C, the integrating
                  capacitors, $C_{i1}$ and $C_{i2}$ are designed to be large during the first two clock
                  phases so that the input thermal noise is to be suppressed. In order to drive the
                  large integrating capacitors ($C_{i1}$ and $C_{i2}$) for the purpose of suppressing
                  the input thermal noise, two-stage fully differential OPAMP with a wide output voltage
                  swing and a compensation capacitor should be employed with the switch, sel12 to be
                  enabled, as shown in Fig. 3. The other small integrating capacitors, $C_{i3}$ and $C_{i4}$ can be driven by the
                  folded-cascode fully differential OPAMP with the switch, sel34 to be enabled during
                  the second clock phases. Justification of employment of two different OPAMPs is as
                  follows. Employment of only one OPAMP for 4th order Delta-Sigma Modulator creates a problem of poor phase margin because of the
                  capacitance difference at each integrator stage. In other words, the OPAMP should
                  drive large capacitances ($C_{i1}$ and $C_{i2}$) during the first two clock cycles
                  and small capacitances ($C_{i3}$ and $C_{i4}$) during the second two clock cycles.
                  This unique situation requires the proposed DSM to employ two different OPAMPs which
                  are capable of handling the phase margin problem properly. The phase margin of the
                  modulator should be in the range of 60 to 90 degrees[6]. If the phase margin exceeds 90 degrees, the integration speed of the integrator
                  will be too slow to be able to complete the integrating operation within the integration
                  time. The integration time is too critical to be neglected especially in the interleaving
                  technique. The on-resistance (Ron) of the switches and the large capacitance (Cs and
                  Cf) in the first and second stages allow a zero of the integrators described in (6) to move less than the unity gain frequency of the two stage OPAMP[7]. This movement of the zero may result in the phase margin exceeding more than 90
                  degrees. Therefore the slow transient speed of the integrator may be unable to integrate
                  the input signal within the integration time, as explained before. The on-resistance
                  of the transmission gate employed as switches is 812Ω and the calculated zero based
                  on (6) is 19.6 MHz.
               
                
                  
                  
 
                  
                  
                  
               
               The simulation results of the loop gain, the phase margin, and the unity gain frequency
                  of the two stage OPAMP demonstrate 125 dB, 68 degrees, and 17 MHz, respectively. The
                  simulation results of the loop gain, the phase margin, and the unity gain frequency
                  of the folded-cascode OPAMP demonstrate 75 dB, 86 degrees, and 19 MHz, respectively.
                  Since the simulated phase margins of two OPAMPs are less than 90 degrees, two OPAMPs
                  should be able to integrate signals within the integration time.
               
                
             
            
                  III. EXPERIMENTAL RESULTS
               The proposed DSM was implemented on a 180 nm 1 poly 6 metal CMOS process and the fabricated
                  chip photograph is presented in Fig. 5. Placement of the digital cells with a guard ring was made on the top to isolate
                  the analog cells (OPAMP and integration capacitors) on the bottom from digital switching
                  signals. The integrating capacitors ($C_{i1}$ , $C_{i2}$ , $C_{i3}$ , and $C_{i4}$)
                  implemented by MiM (Metal-Insulator-Metal) capacitor were placed in the lower left
                  and right hand side of the chip, as shown in Fig. 5.
               
                
                  
                  
                  
               
               The symmetric placement of the analog cells on the bottom part of the chip is made
                  with consideration of device matching. The layout area of the total circuit and the
                  reconfigurable OPAMP with the trans-conductance bias circuit excluding pads occupies
                  850 µm x 950 µm and 300 µm x 70 µm, respectively. The FFT results on the output signal
                  demonstrate the peak SNDR of 72.8 dB and the ENOB of 11.8bits, as presented in Fig. 6 and it is noted that the slope of the noise shaping curve between 1 kHz and 10 kHz
                  is approximately +80 dB/dec, which confirms the basic functionality of the fourth
                  order DSM. The thermal noise, KT/C can be observed at low frequency, so it can be
                  reduced further by increasing the input capacitance.
               
                
                  
                  
                        
                        
Fig. 6. The measured FFT result on the output signal of the DSM.
 
                      
                  
               
               The power consumption was measured to be 356 µW (analog power of 302 µW and digital
                  power of 54 µW). Analog power consists of powers in gm constant bias circuit (115
                  µW), two OPAMPs(175 µW), and a comparator (12 µW). The measured digital power came
                  from clock generator, transmission gate switches, and digital buffers. The measured
                  SNDR as a function of the amplitude of the input signal is demonstrated in Fig. 7. The peak SNDR and dynamic range are measured to be 72.8 dB and 90 dB, respectively.
               
                
                  
                  
                        
                        
Fig. 7. The measured SNDR and dynamic range as a function of the amplitude of the
                           input signal.
                        
 
                      
                  
               
               The ENOB (Effective Number Of Bit) is measured, as shown in Fig. 8, as a function of the input signal frequency ranging from 30 Hz to 1 kHz (bio-signal
                  bandwidth) with the same clock frequency of 256 kHz. The ENOB remains almost constant
                  (11.5-11.8 bit) over the bio-signal bandwidth. The Walden and Schreier FOM (Figure
                  Of Merit) in (7) and (8), respectively are utilized in Table 4 to compare FOM of the proposed work with those of the conventional ones.
               
                
                  
                  
                        
                        
Fig. 8. The measured ENOB as a function of the input signal frequency.
 
                      
                  
               
                
                  
                  
 
                  
                  
                  
               
                
                  
                  
 
                  
                  
                  
               
                
                  
                  
                        
                        
Table 4. The performance comparison of the proposed DSM with the conventional ones
                     
                      
                        
                              
                                 
                                    | Specification | [1][8] | [8][8] | [10][10] | [11][11] | [9][9] | This work | 
                           
                           
                                 
                                    | OSR | 128 | 1024 | 80 | programmable | 512 | 128 | 
                              
                                    | Input signal bandwidth | 1 kHz | 250 Hz | 2 kHz | 250 Hz | 2.048 kHz | 1 kHz | 
                              
                                    | Sampling frequency | 256 kHz | 512 kHz | 320 kHz | - | 512 kHz | 256 kHz | 
                              
                                    | Peak SNDR | 75.7 dB | 56 dB | 64 dB | 58.5 dB | 58.95 dB | 72.8 dB | 
                              
                                    | Dynamic range | 81.6 dB | - | - | - | - | 90 dB | 
                              
                                    | ENOB | 12.3 bits | - | 10.4 bits | 9.4 bits | 11.7 bits | 11.8 bits | 
                              
                                    | Supply voltage | 1.8 V | 3.3 V | 1.6 V | 1.5 V | - | 1.8 V | 
                              
                                    | Power consumption | 828 μW | 75.9 uW | 96 μW | 5.5 uW | 20 μW | 356 μW | 
                              
                                    | FOM(Walden) | 82 pJ/step | 294 pJ/step | 18.53 pJ/step | 7.6 pJ/step | 55.2 pJ/step | 49 pJ/step | 
                              
                                    | FOM(Schreier) | 142.4 dB | - | - | - | - | 155 dB | 
                              
                                    | Process | CMOS 0.18 μm | CMOS 0.5 μm | CMOS 0.15 μm | CMOS 0.18 μm | CMOS 0.5 μm | CMOS 0.18 μm | 
                              
                                    | Order | 4 | 1 | 3 | 1 | 1 | 4 | 
                           
                        
 
                     
                   
                  
               
               where BW, DR, and P stand for bandwidth, dynamic range, and power, respectively.
               The power consumption and FOM(Walden) of the proposed work become half, compared with
                  those of [1][1] which describes the fourth order DSM based upon two OPAMPs reconfigured. The FOM
                  (Schreier) of the proposed work is more than 12 dB with respect to that of [1][1]. Compared with the continuous-time incremental DSM[8], power of the proposed work is greater, but peak SNDR and FOM (walden) become higher.
                  Even though the bio sensor application required low power DSMs[9-11], they suffered from relatively lower SNDR and ENOB than those of the proposed work.
               
                
             
            
                  IV. CONCLUSION
               A CMOS fourth order delta-sigma modulator with only one reconfigurable fully differential
                  operational amplifier is proposed for the application of bio signal processing. The
                  single reconfigurable fully differential amplifier, which can become either a two
                  stage OPAMP (the first and second integrator) or a folded-cascode OPAMP (the third
                  and fourth integrator), was employed not only to provide enough phase margin of the
                  modulator, but also to reduce power consumption of the proposed DSM. This methodology
                  enforces the proposed DSM to increase clock frequency four times with respect to that
                  of the conventional ones due to four cycles reuse of the reconfigurable OPAMP. The
                  proposed modulator is designed and implemented with CMOS 180 nm n-well 1 poly 6 metal
                  process. The measurement results demonstrate the peak SNDR of 72.8 dB and the ENOB
                  of 11.8 bits with an input signal frequency of 250 Hz, a sampling frequency of 256
                  kHz, an input signal bandwidth of 1 kHz, and an oversampling rate of 128. The ENOB
                  of the proposed DSM remains constant (11.5 bits) up to 1 kHz of the bio-signal bandwidth.
                  The total power dissipation was measured to be 356 µW at a supply voltage of 1.8 V.
               
             
          
         
            
                  ACKNOWLEDGMENTS
               This research was supported by Inha University research grant. The authors were grateful
                  to IDEC for the chip fabrication.
               
             
            
                  
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            Author
             
             
             
            
            received the B.S. and MS degree in electrical engineering from Inha University, Incheon,
               Korea, at 2015 and 2017, respectively. 
            
            Since 2017, he is currently working as an analog/RF design engineer at FCI. 
            His main interests are low power mixed-signal analog/RF circuit design.
             
             
            
            received the B.S. degree at Dept. of electronic engineering from Inha University,
               Incheon, Korea, in 1981. 
            
            He received the M.S. and PhD degree at school of ECE from Georgia Institute Tech-nology,
               in 1983, and 1990, respec-tively. 
            
            He has worked as senior design engineer at Tustin, Calif. USA from 1988-1992. 
            Since 1992, he has joined as faculty member at Dept. of EE, Inha University. 
            His main research interests include analog/mixed-signal circuit design such as data
               converters, PMIC, and smart sensor systems.