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Title Development of Organic Thin-film Transistors on a Biocompatible Parylene-C Substrate
Authors (KyungMin Kim) ; (Sookyeong Kim) ; (Ah-Hyun Hong) ; (Yoojeong Ko) ; (Hyowon Jang) ; (Hyeok Kim) ; (Dong-Wook Park)
Page pp.1-7
ISSN 1598-1657
Keywords P3HT; Parylene-C; biocompatible; organic thin-film transistor; cyclic olefin polymer
Abstract Organic thin-film transistors (OTFTs) fabricated on a biocompatible Parylene-C substrate can be applied to biosensors using a simple and cost-effective process. In this study, we developed biocompatible OTFTs by using organic materials to fabricate the substrate, gate dielectric, channel, and passivation layer. Poly(3-hexylthiophene) (P3HT) was used to fabricate the OTFTs on a Parylene-C-based platform. As the gate dielectric, Parylene-C showed promising insulation properties. Finally, we generated a cyclic olefin polymer (COP) passivation layer to protect P3HT from oxygen and moisture, and the effect of the COP passivation layer on the P3HT channel was analyzed. The proposed materials and fabrication methods will be useful for various bio-applications of OTFTs.