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“JSTS has been indexed and abstracted in the SCIE (Science Citation Index Expanded) since Volume 9, Issue 1 in 2009. Furthermore, it continues to maintain its listing in the SCOPUS database and is recognized as a regular journal by the Korea Research Foundation.

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Title Fabrication of Tandem-type Vertically Integrated Nanogenerator by In-situ Deposition of AlN/ZnO Films
Authors 임문혁(Munhyuk Yim) ; 전부일(Buil Jeon) ; 윤기완(Giwan Yoon)
DOI https://doi.org/10.5573/JSTS.2019.19.2.233
Page pp.233-238
ISSN 1598-1657
Keywords Nanogenerator ; zinc oxide ; aluminium nitride ; tandem-type ; interlayer ; vertical integration
Abstract In this paper, we present a tandem-type vertically integrated nanogenerator (TVING) device with five layers of alternately stacked thin films (AlN/ZnO/AlN/ZnO/AlN). The TVING device shows about twice larger output voltages than the conventional VING device with three layers of stacked thin films (AlN/ZnO/AlN). Moreover, the TVING device can be fabricated in a tandem-type structure simply through the vertical integration of two similar VING devices. This device will be usefully applied for biocompatible micro-energy harvesting systems.