| Title |
Research on Sensor Functionality of Next-generation Intelligent Semiconductor Devices using Ga2O3-based UV-C Detector Under Commercial Conditions |
| Authors |
(Hak Jun Ban) ; (Seung Won Lee) ; (Wan-Sik Hwang) ; (Seul Ki Hong) |
| DOI |
https://doi.org/10.5573/JSTS.2024.24.4.373 |
| Keywords |
UV-C; ; semiconductor device; sensor; intelligent semiconductor |
| Abstract |
This study proposes sensor components that can be created using temperature-restricted processes, considering a monolithic 3D system structure for the configuration of next-generation intelligent semiconductor systems. We developed a UV-C detecting sensor using and successfully demonstrated its functionality. Unlike conventional-methods that relied on high voltage and intense UV-C radiation for sensing, our research proved that sensing is achievable with significantly lower voltage and intensity. These innovative results are not limited to advanced packaging and sensor fields but can also be applied across various research areas within the semiconductor industry. Furthermore, the flexible manufacturing approach presented in this study holds great potential not only for industrial applications but also for experimentation and research in academia and research institutions. Therefore, the outcomes of this study are anticipated to drive innovative advancements in the semiconductor industry and have a significant societal and economic impact through their applicationacross diverse fields. |