J. Zhang, J. Frougier, A. Greene, X. Miao, L. Yu, R. Vega, P. Montanini, C. Durfee,
A. Gaul, S. Pancharatnam, C. Adams, H. Wu, H. Zhou, T. Shen, R. Xie, M. Sankarapandian,
J. Wang, K. Watanabe, R. Bao, X. Liu, C. Park, H. Shobha, P. Joseph, D. Kong, A. Arceo
De La Pena, J. Li, R. Conti, D. Dechene, N. Loubet, R. Chao, T. Yamashita, R. Robison,
V. Basker, K. Zhao, D. Guo, B. Haran, R. Divakaruni, and H. Bu, ``Full bottom dielectric
isolation to enable stacked nanosheet transistor for low power and high performance
applications,'' Proc. of IEEE International Electron Devices Meeting, pp. 11.6.1-11.6.4,
2019.
