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  1. (Dept. Engineering of Foundry, Dankook University)



Avalanche breakdown, positive feedback, SCR (silicon controlled rectifier), LVTSCR (low voltage trigger SCR), holding voltage

I. INTRODUCTION

In the modern semiconductor industry, the rapid advancement of semiconductor process technology has led to the miniaturization of various electronic devices. This technology, known as high integration technology, enables the scaling down of key process parameters such as gate oxide thickness, metal interconnect thickness, and junction depth in semiconductor devices. Such technological progress has significantly contributed to improving integration density and yield in semiconductor manufacturing processes. However, as device scaling continues, the sensitivity to Electrostatic Discharge (ESD) phenomena increases, leading to a higher failure rate in IC circuits. In fact, it has been reported that more than 10% of IC failures are caused by ESD events, which has driven extensive research on ESD protection circuits to prevent such damage [1]. Currently, the representative devices used for ESD protection include GGNMOS, SCR, and LVTSCR. The common design objective of these devices is to remain inactive during the normal operation of IC circuits and to respond rapidly only when an ESD event occurs, thereby protecting the circuit [2- 4]. The Gate-Grounded NMOS (GGNMOS) is widely used as an ESD protection device due to its excellent compatibility with standard CMOS processes. In the GGNMOS structure, the gate terminal is connected to the cathode or source terminal. In other words, instead of applying a voltage to the gate to control the channel region, the device operates by activating the internal parasitic BJT within the NMOS to discharge the ESD current. However, compared to the SCR, the GGNMOS exhibits lower current-driving capability since only a single parasitic BJT is active. To overcome this limitation and enhance its current-driving performance, the GGNMOS is typically designed with a multi-finger structure [5- 7]. The Silicon Controlled Rectifier (SCR) is a device that discharges ESD-induced current through the operation of internal parasitic BJTs. Unlike the GGNMOS, the SCR operates using both parasitic PNP and NPN BJTs, which function in a positive feedback mechanism where each BJT supplies current to the base region of the other. Through this operation, the SCR exhibits a much higher current-driving capability than the GGNMOS when compared on a single-device basis. Due to this characteristic, the SCR achieves greater robustness under ESD stress, meaning it can sustain a higher It2 value. However, the SCR has a very high trigger voltage and an extremely low holding voltage. These electrical characteristics can induce latch-up phenomena in IC circuits, which undermines its fundamental purpose of circuit protection. Therefore, despite its superior robustness, the SCR still requires improvement in terms of reliability [8- 10]. The LVTSCR (Low-Voltage-Trigger SCR) is an ESD protection circuit designed through structural modification to reduce the high trigger voltage of the conventional SCR. In this structure, a heavily doped N+ region is inserted between the wells to induce avalanche breakdown at a lower voltage, thereby enabling faster triggering. Through this approach, the LVTSCR effectively improves the high trigger voltage characteristic of the conventional SCR. However, it still suffers from a low holding voltage. To prevent interference with the normal operating voltage range of IC circuits, a higher holding voltage is required for improved reliability [11- 14].

II. PROPOSED ESD PROTECTION DEVICE

1. Operating Principle of the Proposed ESD Protection Device

Fig. 1 shows the cross-sectional structures of the SCR, LVTSCR, and the proposed ESD protection device. The proposed device was designed to improve the low holding voltage of the conventional LVTSCR. To verify this improvement, the operating principles of the conventional SCR and LVTSCR were analyzed, and the operating mechanism and electrical characteristics of the proposed ESD protection device were compared. The operating principle of the SCR is as follows. When no ESD event occurs, the device remains inactive due to the reverse bias between the wells. However, when an ESD surge is applied to the anode, the potential of the N-well gradually increases. Once the N-well potential exceeds the avalanche breakdown threshold, avalanche breakdown occurs, generating electron-hole pairs (EHPs). The generated holes then move toward the P-well, raising its potential and forward-biasing the junction between the P-well and the N+ cathode. As a result, the parasitic transistor QNPN1 inside the SCR is turned on, discharging the ESD surge current through the parasitic BJT conduction path. Due to this operating mechanism, the SCR exhibits a high trigger voltage, which must be reduced for integration into IC circuits. In addition, although the internal parasitic BJTs operate through a positive feedback mechanism that provides high current-driving capability, this also results in an extremely low holding voltage. The LVTSCR was developed to improve the high trigger voltage of the conventional SCR. In the LVTSCR structure, a heavily doped N+ region is inserted between the wells. This design lowers the avalanche breakdown voltage that occurs between the relatively lightly doped wells, as the breakdown voltage decreases when the junction involves a more heavily doped implant region. In addition, the LVTSCR incorporates a GGNMOS structure within the conventional SCR. As a result, the effective base region of the parasitic NPN BJT beneath the gate area-where no Shallow Trench Isolation (STI) is present-becomes shorter. Consequently, the parasitic NPN BJT turns on more quickly, allowing the LVTSCR to achieve a lower trigger voltage. As a result, the LVTSCR retains the fundamental operating principle of the conventional SCR while incorporating a structural advantage that lowers the trigger voltage through avalanche breakdown occurring between the N+ region and the P-well. However, both the SCR and LVTSCR require a higher holding voltage for practical application in IC circuits. The proposed ESD protection device, similar to the LVTSCR, incorporates a heavily doped P+ region between the wells to lower the trigger voltage and introduces an additional metal path to form a new discharge path for the parasitic NPN BJT. As a result, the proposed structure achieves a higher holding voltage compared to the conventional SCR and LVTSCR. Furthermore, by adding a Deep N-well, the proposed device enables the parasitic NPN BJT to operate more widely in the lower region, thereby achieving higher current-driving capability. The operating principle of the proposed ESD protection device is as follows. When no ESD event occurs, the device remains inactive due to the reverse bias between the N-well and P+ region. However, when an ESD surge is applied to the anode, the potential of the N-well continuously increases. Once the N-well potential exceeds the avalanche breakdown threshold with the P+ region, avalanche breakdown occurs, generating electron-hole pairs (EHPs). The generated holes then move toward the P-well and metal regions, which reduces the current flowing into the P-well. As a result, the gain of the positive feedback loop formed along the BJT discharge path decreases, leading to an increase in the holding voltage. The holes continue to flow into the P-well, further raising its potential, and consequently, the P-well and N+ cathode become forward-biased. At this point, the parasitic BJTs QNPN1 and QNPN2 are activated, discharging the ESD surge current through the parasitic BJT conduction paths.

Fig. 1. Cross-sectional structures of (a) SCR, (b) LVTSCR, and (c) the proposed ESD protection device.

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2. Analysis of TCAD Simulation Results

In this study, TCAD simulations were performed using Synopsys TSUPREM-4 and MEDICI to verify the operating principle of the proposed ESD protection device. Fig. 2 shows the cross-sectional structures of the SCR, LVTSCR, and the proposed ESD protection device implemented through TCAD simulations. During the electrical characteristic calculations, the mesh density was gradually increased in the vicinity of the junction regions to enable more accurate numerical analysis. The width of each ESD protection device was fixed at 1 $\mu$m, while the lengths were set to 13 $\mu$m for the SCR-based ESD protection device, 13 $\mu$m for the LVTSCR, and 17 $\mu$m for the proposed ESD protection device. In addition, the lengths of the heavily doped N- and P-type implant regions were set to 1 $\mu$m, and the spacing between each implant was fixed at 1 $\mu$m. For the ion implantation conditions, the heavily doped N- and P-type implants were set to implantation doses of 3 $\times$ 1015 cm-2 or higher, while the NWELL and PWELL regions were set to implantation doses of 8 $\times$ 1012 cm-2 or higher. Each implantation condition was repeated four times for the simulations.

Fig. 2. Cross-sectional structures of (a) SCR, (b) LVTSCR, and (c) the proposed ESD protection device implemented by TCAD simulation.

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The impact ionization simulation results for each structure are shown in Fig. 3. In this impact ionization analysis, a gradually increasing input voltage was applied to the anode terminal from 0.1 to 30 V with a voltage step of 0.1 V, while the cathode terminal was grounded. As shown in Fig. 3(a), the avalanche breakdown of the SCR is observed to occur between the wells. In Fig. 3(b), a high level of impact ionization is generated at the N+ region and the P-well of the LVTSCR, indicating that the LVTSCR undergoes avalanche breakdown at a lower voltage compared to the conventional SCR. Finally, for the proposed ESD protection device shown in Fig. 3(c), a high level of impact ionization is observed at the N-well and P+ regions. Through this analysis, the avalanche breakdown locations of each device were identified. Fig. 4 presents the total current flowline simulation results of the SCR, LVTSCR, and the proposed ESD protection device. The simulations were performed under the same voltage bias conditions used in the impact ionization analysis. As shown in the figure, the discharge paths of the parasitic BJTs in each device can be identified. In particular, for the proposed ESD protection device shown in Fig. 4(c), the current is observed to flow through an additionally formed metal path.

Fig. 3. Impact ionization regions of (a) SCR, (b) LVTSCR, and (c) the proposed ESD protection device implemented by TCAD simulation.

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Fig. 4. Total current flowline of (a) SCR, (b) LVTSCR, and (c) the proposed ESD protection device implemented by TCAD simulation.

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III. RESULTS AND DISCUSSION

1. Comparison and analysis

The SCR, LVTSCR, and proposed ESD protection devices designed in this study were fabricated using a 0.18-$\mu$m BCD process and were identically designed with a width of 100 $\mu$m based on heavily doped implant conditions. The device areas of the SCR, LVTSCR, and the proposed ESD protection device are 24 $\mu$m $\times$ 102 $\mu$m (2448 $\mu$m2), 26 $\mu$m $\times$ 102 $\mu$m (2652 $\mu$m2), and 35.84 $\mu$m $\times$ 109.6 $\mu$m (3928 $\mu$m2), respectively. Fig. 5 shows the layout of the proposed ESD protection device along with a magnified image of the fabricated device. In addition, the electrical characteristics of the proposed ESD protection device were analyzed using a Transmission Line Pulse (TLP) system.

Fig. 5. (a) Layout image of the proposed ESD protection device, and (b) magnified image of the proposed device fabricated using the 0.18-$\mu$m process.

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Fig. 6. Simplified layout of the proposed ESD protection device.

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Fig. 7 presents the TLP-measured I-V characteristic curves of the SCR, LVTSCR, and the proposed ESD protection device. According to the TLP measurement results, the trigger voltages of the SCR, LVTSCR, and the proposed ESD protection device were measured to be 20 V, 14.22 V, and 14.47 V, respectively. Compared with the conventional SCR, the proposed device exhibits a trigger voltage reduced by more than 6 V and shows a trigger voltage comparable to that of the LVTSCR. This reduction in trigger voltage is attributed to the fact that avalanche breakdown occurs at a lower voltage between the heavily doped implant and the well regions. In addition, the holding voltages of the SCR, LVTSCR, and the proposed ESD protection device were measured to be 3.27 V, 3.56 V, and 6.11 V, respectively, indicating that the proposed device possesses electrical characteristics suitable for IC circuits operating at a supply voltage of 5 V. The increase in holding voltage of the proposed ESD protection device is attributed to the dispersion of holes generated after avalanche breakdown, which are distributed and transported through both the P-well and an additionally formed metal path. Unlike the conventional SCR and LVTSCR, in which holes generated after avalanche breakdown flow only through the P-well, the proposed device allows hole transport through the additional metal path as well.

Fig. 7. TLP measurement results of the SCR, LVTSCR, and the proposed ESD protection device.

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As a result, the gain of the positive feedback loop formed along the parasitic BJT discharge path is reduced, leading to an increase in the minimum operating voltage of the parasitic BJT. Consequently, the proposed ESD protection device exhibits a higher holding voltage compared to the conventional SCR and LVTSCR. However, due to the reduced gain of the positive feedback loop along the parasitic BJT discharge path, the current driving capability of the proposed ESD protection device is degraded, resulting in an increase in the on-resistance (Ron). Consequently, compared with the conventional SCR and LVTSCR, the proposed device exhibits a higher Ron value. Furthermore, this increase in resistance leads to a reduction in the It2 value, which represents the point at which the ESD protection device undergoes thermal failure.

Table 1. Summary of the electrical characteristics of the SCR, LVTSCR, and the proposed ESD protection device.

Structure Trigger voltage (Vt1) [V] Holding voltage (Vh) [V] 2nd breakdown current (It2) [A] On-state resistance (Ron) [$\Omega$]
SCR 20 3.27 > 9.5 0.81
LVTSCR 14.22 3.56 > 9.5 1.11
The proposed ESD protection device 14.47 6.11 8.0 1.83

2. Design for improving current driving capability

Fig. 8 shows the structure of the proposed ESD protection device in which a heavily doped P+ region and a P-well were additionally inserted at the anode side to form an additional parasitic PNP BJT path. This design approach enables more parasitic BJTs to operate simultaneously compared to the previously proposed ESD protection device, thereby enhancing the current driving capability. The operating principle of the device shown in Fig. 8 is similar to that of the proposed ESD protection device; however, when an ESD event occurs, the additional parasitic PNP BJT path is activated and participates in the discharge operation.

Fig. 8. Cross-sectional structure of the proposed ESD protection device with an added PNP BJT.

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3. Comparison and analysis

Fig. 9. Simplified layout of the proposed ESD protection device with an added PNP BJT.

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Fig. 10 shows the TLP-measured I-V characteristic curves of the proposed ESD protection device and the proposed device with an additional PNP BJT. This improvement is attributed to the enhanced current driving capability resulting from the operation of the additionally formed PNP BJT at the anode side. Analysis of the TLP measurement results indicates that the Ron value is reduced, and consequently, the thermal robustness of the device is improved, leading to an increase in the It2 value. Although this design approach is effective in enhancing the current driving capability, it suffers from the drawback of increased device area due to the addition of the parasitic BJT discharge path. The area of the previously proposed ESD protection device is 35.84 $\mu$m $\times$ 109.6 $\mu$m, corresponding to 3928 $\mu$m2, whereas the area of the ESD protection device increases to 42.73 $\mu$m $\times$ 109.6 $\mu$m, corresponding to 4683 $\mu$m2, when the PNP BJT is additionally formed.

Fig. 10. TLP measurement results of the proposed ESD protection device and the proposed ESD protection device with an added PNP BJT.

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Table 2. Electrical characteristics of the proposed ESD protection device with an added PNP BJT.

Structure Vt1 [V] Vh [V] It2 [A] Ron [$\Omega$]
The proposed ESD protection device 14.22 6.11 8.0 1.83
The proposed ESD protection device with an added PNP BJT 14.42 5.75 > 9.5 1.25

4. Analysis of Electrical Characteristics According to Design Parameter D1

Fig. 11 shows the structure of the proposed ESD protection device with an added highly doped N+ floating region. The floating region extends the effective base region of the parasitic PNP BJT, and the presence of the highly doped N+ region in the discharge path slows down the carrier recombination rate within the base region of the parasitic PNP BJT. As a result of this design, the current gain ($\beta$) and loop gain of the parasitic PNP BJT decrease, leading to an increase in the operating voltage of the parasitic PNP BJT. Therefore, this structural design contributes to an improvement in the holding voltage of the device. Fig. 11 shows the TLP measurement results according to variations in the length of the N+ floating region, defined as design parameter D1. The lengths of D1 were set to 3 $\mu$m, 5 $\mu$m, and 7 $\mu$m, increasing by 2 $\mu$m for each case. The TLP results indicate that as D1 increased by 2 $\mu$m, the holding voltages were measured to be 7.3 V, 8.22 V, and 9.7 V, respectively. This result can be attributed to the reduction in current gain ($\beta$) and loop gain of the parasitic PNP BJT, as previously discussed, which leads to an increase in holding voltage. Therefore, it was confirmed that introducing and extending the design parameter D1 serves as an effective design approach that directly contributes to enhancing the holding voltage of the device.

Fig. 11. Cross-sectional structure of the proposed ESD protection device with the added design parameter D1.

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Fig. 12. TLP measurement results of the proposed ESD protection device and the proposed ESD protection device with an added PNP BJT.

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Table 3. Electrical characteristics of the proposed ESD protection device with an added PNP BJT.

Design parameter [$\mu$m] Vt1 [V] Vh [V]
D1 1 14.22 6.11
3 14.59 7.3
5 14.72 8.22
7 14.54 9.7

IV. CONCLUSIONS

In this study, an ESD protection device with an improved holding voltage was proposed. The proposed ESD protection device exhibits a higher holding voltage compared to the conventional SCR and LVTSCR, while maintaining a trigger voltage comparable to that of the LVTSCR. As a result, the proposed device was verified to be suitable for IC circuits operating at a supply voltage of 5 V. However, the design approach of the proposed ESD protection device reduces the gain of the positive feedback loop due to the additionally formed metal discharge path, which degrades the current driving capability and leads to an increase in the on-resistance (Ron). Consequently, the thermal robustness of the device is reduced, resulting in a decrease in the It2 value. To address this issue, a design approach incorporating an additional PNP BJT path was adopted, and the Ron value was confirmed to be effectively reduced compared to that of the original device. Nevertheless, this design approach increases the device area, and therefore, optimization of the electrical characteristics must be carefully considered by taking the area overhead into account. Furthermore, the electrical characteristics were investigated as a function of the design parameter D1, and an effective modulation of the holding voltage was confirmed. The proposed ESD protection device targets IC circuits operating at a 5 V supply voltage, and based on the electrical characteristics verified in this study, it is expected that the proposed device can provide effective ESD protection with high reliability when applied to practical IC circuits.

ACKNOWLEDGMENTS

This study was conducted with the support of the Compound Material-based Next Generation Power Semiconductor Technology Development Project of the Ministry of Trade, Industry and Energy and the Korea Institute for Industrial Technology Evaluation (RS-2022-00143842, ?Single/Three-phase AC/DC Converter Smart Power IC using SiC MOSFET devices?) and This study was supported by the Technology Innovation Program (or Industrial Strategic Technology Development Program) ("RS-2023-00235759", Development of Wireless Charging SoC with Built-In ESD Protection Circuit for Wearable Devices) funded By the Ministry of Trade, Industry & Energy(MOTIE, Korea) (2410009645) and This study was supported by National R&D Program through the National Research Foundation of Korea(NRF) funded by Ministry of Science and ICT (RS-2021-NR057239)

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Dong-Hyeon Kim
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Dong-Hyeon Kim was born in Seongnam, Republic of Korea, in 2000. He has been a master's course in Foundry Engineering at Dankook University since 2024. His current research interests include electrostatic discharge (ESD) protection circuit design and power semiconductor devices such as BJT with a focus on ESD protection circuit design.

Jae-Yoon Oh
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Jae-Yoon Oh was born in Seoul, Republic of Korea, in 1998. He has been a master's course in Foundry Engineering at Dankook University since 2024. His current research interests include electrostatic discharge (ESD) protection circuit design and power semiconductor devices such as BJT with a focus on ESD protection circuit design.

Min-Seo Kim
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Min-Seo Kim was born in Seoul, Republic of Korea, in 2000. She has been a master's course in Foundry Engineering at Dankook University since 2024. Her current research interests include electrostatic discharge (ESD) protection circuit design and power semiconductor devices such as BJT with a focus on ESD protection circuit design.

Cheon-Hoo Jeon
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Cheon-Hoo Jeon received the B.S. and Ph.D. degrees in electronic and electrical engineering from the Pohang University of Science and Technology (POSTECH), Pohang, South Korea, in 2014 and 2021, respectively. From 2021 to 2023, he was a Senior Engineer with Samsung Electronics, Hwaseong, South Korea, where he worked on CMOS image sensor designs. In 2023, he joined the Department of Convergence Semiconductor Engineering, Dankook University, Yong-in, South Korea, where he is currently an Assistant Professor. His research interests include low-power analog circuits including sensor interface circuits, battery management systems and wireless sensor systems for biomedical devices.

Jung-Won Kang
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Jung-Won Kang received the B.S. degree in electronic engineering from Korea University, Seoul, Republic of Korea, in 1990, and his M.S. and Ph.D. degrees in electrical engineering from the University of Arizona, Tucson, AZ, USA, in 1994 and 1997, respectively. From 1992 to 1997, he worked as a Research Associate at the SEMATECH Center. In 1997, he joined LG Semiconductor (currently SK Hynix) as a Senior Researcher and later worked at the LG Display Research Center from 1998 to 2003. He also served as an external lecturer at Korea University in 2000 and as a Research Professor at Kyoto University, Japan, from 2001 to 2002. In 2004, he joined the Department of Electronic and Electrical Engineering, Dankook University, where he is currently a Professor. His research interests include organic/inorganic hybrid semiconductor materials, high-efficiency photovoltaic devices such as perovskite solar cells, and advanced sensors including photodetectors and X-ray detectors.

Yong-Seo Koo
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Yong-Seo Koo received the B.S., M.S., and Ph.D. degrees from the Department of Electronic Engineering from Sogang University, Seoul, Republic of Korea, in 1981, 1983, and 1992, respectively. From 1983 to 1993, he had worked at Electronics Telecommunications Research Institute as a senior researcher. In 2009, he joined the Department of Electronics and Electrical Engineering, Dankook University as a Professor. His research interests include electrostatic discharge (ESD) protection circuit design, silicon carbide (SiC) power device, high-efficiency power management integrated circuits (PMICs).