I. INTRODUCTION
Currently, dynamic random-access memory (DRAM) is facing limitations in device reduction
and performance improvement due to its structure including capacitors. Reducing the
size of the capacitor leads to problems such as increased power consumption resulting
from limited charge retention capacity, increased leakage current in high-temperature
environments, and increased demand for data refresh. To solve these problems, capacitor-less
DRAM (one-transistor DRAM, 1T-DRAM), which performs memory operations without capacitors,
is attracting attention [1,2,3,4,5,6,7,8,9]. 1T-DRAM can perform memory functions with only a single transistor, making it easier
to reduce the size of the device compared to existing DRAM [10,11,12,13,14,15,16,17].
To maximize the performance of 1T-DRAM, optimization of device dimensions is essential.
The dimensions of a device directly impact current flow, memory performance and data
retention. By adjusting these dimensions, the memory's integration density can be
increased, thereby achieving efficient performance [18,19]. Additionally, optimization using the transistor's zero-temperature coefficient (ZTC)
point serves an important role in minimizing performance changes caused by temperature
variations and maintaining consistent performance in various temperature environments[28,29,30,31,32]. Setting the operation point is also an important factor in optimizing the performance
of 1T-DRAM devices. Appropriate operation point setting maximizes data retention performance
while enhancing memory performance and selecting the optimal operating point enhances
device stability and ensures consistent performance under various conditions [20].
This study presents a method to design a memory device that can maintain reliability
even in a high temperature environment by optimizing the device dimension and operation
point of 1T-DRAM. By analyzing current-voltage ($I$-$V$) characteristics under various
temperature conditions and proposing design techniques that minimize performance degradation
using ZTC points, new approaches can be explored to overcome the limitations of existing
DRAM and to maximize device performance and integration. Accordingly, a foundation
will be established to contribute to the development of next-generation memory devices
with high reliability against temperature variations.
III. RESULTS AND DISCUSSION
The ZTC point is the gate voltage at which current variation due to temperature changes
is minimized [28,31], serving as a critical reference point that reduces the temperature sensitivity of
the device and ensures stable performance even at high temperatures. Previous studies
applied the ZTC concept to analyze the current-voltage characteristics of 1T-DRAM
under temperature variations and confirmed that memory operation at the ZTC point
remained stable despite temperature changes [20]. These studies demonstrated that the ZTC point serves as a crucial reference for
ensuring reliable operation even at high temperatures. In this study, the ZTC concept
is utilized to minimize drain current fluctuations in 1T-DRAM depending on device
parameters and to ensure stable operation even in high-temperature environments (300
K-400 K).
Fig. 2 shows the drain current characteristics as a function of gate voltage under various
temperature conditions (300 K-400 K) and WF1, which are shown in both linear and log
scales. In Fig. 2(a), the shift of the ZTC point with changes in WF1 can be observed. At the ZTC point,
the current is hardly affected by temperature variations. However, before and after
the ZTC point, the current characteristics vary with temperature changes [26]. Before the ZTC point, as the temperature increases, the carrier concentration rises
due to thermal generation effects, resulting in a higher drain current value. In contrast,
beyond the ZTC point, as the temperature rises, the increase in phonon scattering
decreases carrier mobility, resulting in a reversal phenomenon where the current reduces.
The reversal phenomenon can cause instability in memory operation within a specific
range, potentially degrading data retention performance at high temperatures.
Fig. 2. Transfer characteristics of the 1T-DRAM with variation of temperature (300
K, 318 K, 328 K, 338 K, 348 K, 358 K, 380 K, 400 K). (a) linear scale, (b) log scale.
In Fig. 2(a), as the ZTC point shifts to the right, the threshold voltage also shifts to the right,
resulting in the device operating at a higher operation point. In contrast, as the
ZTC point shifts to the left, the threshold voltage also shifts to the left, lowering
the operation point. The shift of the ZTC point alters the operating voltage range
of the device, and this change directly impacts memory performance in practical environments.
However, even if the ZTC point shifts, the device can operate stably at this point
without being significantly affected by temperature variations. Therefore, the location
of the ZTC point serves as a critical design factor with respect to the device's memory
operation efficiency and stability.
Fig. 2(b) shows the changes observed in the off-current state. The off-current refers to the
drain current flowing when the gate voltage is 0 V, and its value increases as the
WF1 value decreases. This is because the energy barrier is lowered, allowing charges
to leak more easily, which can significantly affect the retention time of the memory
along with a reduction in the threshold voltage. Therefore, it is essential to optimize
the WF1 value by considering the off-current variations induced by temperature changes.
Fig. 3. Zero temperature coefficient (ZTC) point as a function of body doping concentration
for different work function (WF1) values.
Fig. 3 shows the impact of WF1 and body doping concentration variations on the ZTC point.
As the WF1 value increases, the ZTC point generally rises. Notably, when WF1 is above
4.8 eV, the ZTC point remains almost identical for body doping concentrations of $1
\times 10^{16}$ cm${}^{-3}$ and $1 \times 10^{17}$ cm${}^{-3}$. This phenomenon occurs
because a high WF1 value compensates for the variations in mobility and threshold
voltage caused by temperature changes, thereby stabilizing the position of the ZTC
point [33]. However, when the body doping concentration increases to $1\times 10^{18}$ cm$^{-3}$,
the ZTC point tends to rise. At high body doping concentrations, the electric field
within the channel is intensified, resulting in a significant reduction in mobility.
To compensate for this, the threshold voltage increases, thereby causing the ZTC point
to rise. When the WF1 value is below 4.8 eV, the compensation between the temperature-dependent
effects of mobility and threshold voltage is insufficient, resulting in the ZTC point
not remaining consistent.
In Fig. 2, the temperature range of 300 K to 400 K was analyzed to investigate the transfer
characteristics under varying thermal conditions. In contrast, the measurements in
Fig. 4 were conducted for memory characteristic analysis, with the high-temperature condition
set to 358 K ($= 85^\circ{C}$), a commonly referenced evaluation point in evaluations
of DRAM retention characteristics.
Fig. 4. (a) Memory characteristics of the 1T-DRAM with variation of read gate voltage
($R_{\_\rm_vg1}$), (b) drain current at ``1'' and ``0'' states as a function of gate
voltage in read operation.
Fig. 4(a) shows the voltage range of 0.9 V to 1.4 V, which represents the gate voltage (${R}_{\_\rm
vg1}$) in the read state, and this range was set to evaluate memory performance under
various gate voltage conditions of the 1T-DRAM. The memory characteristics were analyzed
using the 1T- when WF1 was 4.7 eV and the body doping concentration was $1 \times
10^{17}$ cm${}^{3-}$. DRAM memory operating voltage conditions are presented in Table 2. The program (write ``1'') phase utilizes the band-to-band tunneling (BTBT) phenomenon.
In this phenomenon, electron-hole pairs are generated between the conduction band
and the valence band when a high electric field is induced by the gate voltage [27]. During this phase, the concentration of holes formed through BTBT is a critical
factor in determining the sensing margin. In the ``1'' state, numerous holes are generated
through BTBT and accumulate in the body region under gate 2, maintaining a high current.
In contrast, in the ``0'' state, BTBT occurs very limitedly, resulting in a lower
hole concentration and maintaining a low current. The difference in drain current
between the read ``1'' state and the read ``0'' state is referred to as the sensing
margin, which serves as a critical metric for evaluating memory performance. The sensing
margin at a gate voltage of 1.1 V was 12.549 $\mu$A, confirming that the memory operates
normally (${T }= 300$ K). Additionally, the drain current variations were observed
under the given temperatures (300 K, 358 K) as a function of the gate voltage ($R_{\_\rm
vg1}$) in the read state. The sensing margin varies depending on temperature and gate
voltage conditions, and a reversal in current values between the read ``1'' and read
``0'' states can be observed at 300 K and 358 K within a specific voltage range.
Table 2. Bias conditions for memory of the 1T-DRAM.
|
Write “1” (Program)
|
Write “0” (Erase)
|
Read
|
Hold
|
Main gate voltage (VGS1)
|
2.5 V
|
0.0 V
|
0.9 V-1.4 V
|
0.0 V
|
Control gate voltage (VGS2)
|
-2.5 V
|
0.5 V
|
0.0 V
|
-0.1 V
|
Drain voltage (VDS)
|
0.0 V
|
-0.5 V
|
0.5 V
|
0.0 V
|
Fig. 4(b) shows the drain current variations of the read ``1'' and ``0'' states as a function
of gate voltage ($R_{\_\rm vg1}$) at temperatures of 300 K and 358 K. The arrows in
the figure are used to highlight the current values within the specified voltage range
and display an enlarged graph, clearly illustrating the differences in memory operation
characteristics with respect to temperature. In the region where the gate voltage
($R_{\_\rm vg1}$) is at or below 0.9 V, it can be observed that the read ``0'' value
at 358 K is nearly identical to the read ``1'' value at 300 K. However, in the region
where the gate voltage ($R_{\_\rm vg1}$) is above 1.4 V, the read ``0'' value at 300
K is greater than the read ``1'' value at 358 K. This phenomenon occurs due to variations
in drain current caused by temperature changes. This reversal phenomenon, where the
read ``0'' value is greater than the read ``1'' value, is a cause of reduced stability
in memory operation within specific regions. Therefore, it is crucial to define the
optimal range of gate voltage ($R_{\_\rm vg1}$) to maximize the stability of the memory
device.
The sensing margin and reversal phenomenon observed in Fig. 4 are further analyzed through the electron density and mobility distributions shown
in Fig. 5. Fig. 5 shows the variations in electron density and mobility during the read operation in
the 1T-DRAM, clearly presenting the differences in physical phenomena before and after
the ZTC point ($= 1.15$ V).
Fig. 5. Electron density distribution in 1T-DRAM during read operations: (a) 0.9 V
at 300 K for read ``1'' and 0.9 V at 358 K read ``0'' states, (b) 1.1 V at 358 K for
read ``1'' and read ``0'' states. Electron mobility distribution in 1T-DRAM during
read operations: (c) 1.4 V at 358 K for read ``1'' and 1.4 V at 300 K for read ``0''
states.
Fig. 5(a) shows the electron density distribution in the region before the ZTC point, comparing
the read ``1'' state at 300 K and the read ``0'' state at 358 K when the gate voltage
($R_{\_\rm vg1}$) in the read state is 0.9 V. In the read ``1'' state, the electron
density within the channel remains uniform, whereas in the read ``0'' state, the electron
density significantly increases inside the channel due to thermal generation effects,
leading to a higher current value and causing a reversal phenomenon where it exceeds
the read ``1'' value.
Fig. 5(b) shows the electron density distribution comparing the read ``1'' and read ``0'' states
at 358 K when the gate voltage ($R_{\_\rm vg1}$) in the read state is 1.1 V. In this
region, the electron density within the channel is higher in the read ``1'' state
than in the read ``0'' state, indicating that no reversal phenomenon occurs and the
device remains in a normal state.
Fig. 5(c) shows the electron mobility distribution for the read ``1'' state at 358 K and the
read ``0'' state at 300 K when the gate voltage in the read state is 1.4 V. In the
read ``0'' state, the electron mobility density is higher than in the read ``1'' state,
resulting in a larger current value and causing a reversal phenomenon. The reversal
phenomenon demonstrates the differences in physical phenomena, such as thermal generation
effects and changes in electron mobility, before and after the ZTC point, providing
valuable insights for evaluating the stability and performance of memory devices.
The gate voltages ($R_{\_\rm vg1}$) used in Figs. 6 and 7 are summarized in Table 3. These values were determined based on the ZTC point of each parameter condition.
The measurements in Figs. 6 and 7 were conducted using these optimal read voltages.
Fig. 6(a) and (b) show how the drain current changes over time at temperatures of 300 K and 358 K,
respectively, when the WF1 value and body doping concentration are varied. The data
state of the 1T-DRAM utilizes the characteristic that the hole concentration is high
in the read ``1'' state and low in the read ``0'' state. The read operation was performed
at the ZTC point, and it was confirmed that ``1'' and ``0'' are clearly distinguishable.
Fig. 6(c) shows the changes in sensing margin depending on WF1 and body doping concentration.
The sensing margin increases with the rise in WF1 and reaches its peak value at WF1
= 4.9 eV. However, when WF1 increases to 5.0 eV or higher, the electric field weakens.
This reduction in the electric field causes a decrease in the BTBT phenomenon. As
a result, the hole generation rate drops, which reduces the current difference between
the read ``1'' and ``0'' states and lowers the sensing margin.
The body doping concentration is a key parameter related to the body characteristics
of 1T-DRAM, serving a crucial role in controlling hole generation. At low doping concentrations,
the depletion region widens, and the electric field weakens, potentially limiting
hole generation through the BTBT phenomenon. As a result, the sensing margin is reduced.
This makes it difficult to reliably distinguish between data states. At higher doping
concentrations, the depletion region becomes narrower, and the electric field intensifies,
enhancing the BTBT phenomenon and increasing the sensing margin. Consequently, by
optimally setting WF1 and body doping concentration, the sensing margin and data stability
can be maximized.
Table 3. Optimal read gate voltages ($R_{vg1}$) for different work functions (WF1)
and body doping conditions.
Work function
(WF1) [eV]
|
Body doping
[cm-3]
|
Read gate voltage
(R_vg1) [V]
|
4.6
|
1 × 1017
|
1.05
|
4.7
|
1 × 1016
|
1.1
|
4.7
|
1 × 1017
|
1.15
|
4.7
|
1 × 1018
|
1.2
|
4.8
|
1 × 1017
|
1.2
|
4.9
|
1 × 1017
|
1.3
|
5.0
|
1 × 1017
|
1.4
|
5.1
|
1 × 1017
|
1.5
|
Fig. 6. Memory characteristics of the 1T-DRAM with variation of (a) work function
(WF1) values (4.6 eV-5.1 eV), (b) body doping concentrations (1016 cm-3-1018 cm-3). (c) Sensing margin of the 1T-DRAM as a function of work function (WF1) for body
doping concentrations.
Fig. 7. Retention characteristics of the 1T-DRAM at 300 K and 358 K under different
work function (WF1) values: (a) WF1 $= 4.6$ eV, (b) 4.7 eV, and (c) 5.0 eV.
Figs. 7(a)-7(c) show the data retention characteristics of the 1T-DRAM as a function of WF1 values
and demonstrate the impact of the asymmetric double-gate structure's design characteristics
on data retention time. The depletion region formed between gate 1 and gate 2 in this
structure suppresses hole recombination and effectively retains holes, enhancing data
stability.
In Fig. 7(a), the read ``1'' state current of the 1T-DRAM with a WF1 of 4.6 eV declines sharply
after around 30 ms. This is attributed to the reduction of the depletion region at
lower WF1 values, which is insufficient to inhibit hole recombination. Therefore,
holes cannot be retained for a prolonged period, which results in shorter data retention
time and makes it difficult to reliably distinguish data states. As the WF1 value
increases, the depletion region expands. This expansion effectively suppresses hole
recombination. As a result, the current in the read ``1'' state remains stable for
approximately 70 ms in Fig. 7(b), improving the distinction and stability of data states.
In Fig. 7(c), the WF1 value significantly increases, leading to the sufficient formation of the
depletion region. This depletion region strongly suppresses the recombination of holes
and electrons, allowing the current in the read ``1'' state to remain stable for approximately
330 ms. All preceding results were obtained using the ZTC point as the operating voltage
condition for the read operation, confirming a clear distinction between the read
``1'' and ``0'' states. Furthermore, retention characteristics were successfully achieved
under these conditions.
Fig. 8. Retention time of the 1T-DRAM with different work functions (WF1) at 358 K.
Fig. 8 shows the variation in retention time of the 1T-DRAM as a function of WF1. As the
WF1 value increases, a tendency for longer retention time can be observed. This is
because a higher WF1 value strengthens the electric field formed by gate 1, which
increases the generation of holes. The generated holes are suppressed from recombining
due to the depletion region and are stably retained in the body region beneath gate
2. At WF1 $= 4.6$ eV, the retention time is short at approximately 30 ms, while it
increases steadily as the WF1 value rises. At WF1 $= 5.1$ eV, the retention time reaches
approximately 550 ms, and this further improves data retention characteristics. However,
if the WF1 value becomes excessively high, the sensing margin may decrease, and this
makes it more difficult to distinguish data states.