Volume 5, Number 1, March 2005 (ISSN 1598-1657)  

SPECIAL ISSUE ON MICROTRANSDUCER TECHNOLOGIES

Foreword ······················································································································································· Kukjin Chun
i
Editorial ························································································································································· Euisik Yoon
ii

Microsystems for Whole Blood Purification and Electrophysiological Analysis·································································
···············································································Arum Han, Ki-Ho Han, Swomitra K. Mohanty, and A. Bruno Frazier
1
Polymer/Metal Based Flexible MEMS Biosensors for Nerve Signal Monitoring and Sensitive Skin··································
············································································································Yong-Ho Kim, Eun-Soo Hwang, and Yong-Jun Kim
11
Simulation of Piezoelectric Dome-Shaped-Diaphragm Acoustic Transducers·····································································
······································································································································Cheol-Hyun Han and Eun Sok Kim
17
Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications
······················································································································Hyo-Jin Nam, SeongSoo Jang,Young-Sik Kim,
··················································································Caroline Sunyong Lee, Won-Hyeog Jin, Il-Joo Cho, and Jong-Uk Bu
24
Fabrication of Electrochemical Sensor with Tunable Electrode Distance·············································································
················································································································································Yuheon Yi and Je-Kyun Park
30
Investigation of Pyrolyzed Polyimide Thin Film as MEMS Material·················································································
····················································Keisuke Naka, Hideki Nagae, Masao Ichiyanagi, Ok Chan Jeong, and Satoshi Konishi
38
  Characteristics of Surface Micromachined Pyroelectric Infrared Ray Focal Plane Array····················································
··························Sang-Ouk Ryu, Seong Mok Cho, Kyu-Jeong Choi, Sung-Min Yoon, Nam-Yeal Lee, and Byoung-Gon Yu
45
  Fabrication of Circular Diaphragm for Piezoelectric Acoustic Devices················································································
······························································Woon Seob Lee, Yong Chul Kim, Jin Seung Lee, Seok Woo Lee, and Seung S. Lee
52

 

Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications··········································································································································································
····························································Illhwan Kim, Seonho Seok, Hyeon Cheol Kim, Moon Koo Kang, and Kukjin Chun
58

 

 

Call Papers on September 2005 Special Issue on Semiconductor Devices
67
A Publication of the Institute of Electronics Engineers of Korea
http://www.jsts.org